Computational study of plasma dynamics and reactive chemistry in a low-pressure inductively coupled CF4/O2 plasma

Inductively coupled plasma mass spectrometry.

Review

Laser Ablation Inductively Coupled Plasma

Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) is one of the most successful direct solid sampling techniques for major, minor and trace element analysis. However, this technique still suffers from matrix dependent ablation characteristics, which makes quantification very difficult. Furthermore, the laser sampled material alters its composition from the sample to the de...

One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma

Electron energy probability function and L-p similarity in low pressure inductively coupled bounded plasma

*Correspondence: Sudeep Bhattacharjee, Waves and Beams Laboratory, Department of Physics, Indian Institute of Technology Kanpur, Grand Trunk Road, Kalyanpur, Kanpur 208016, UP, India e-mail: [email protected] Particle-In-Cell (PIC) simulations are carried out to investigate the effect of discharge length (L) and pressure (p) on Electron Energy Probability Function (EEPF) in a low pressure radi...

Plasma abatement of perfluorocompounds in inductively coupled plasma reactors

Perfluorinated compounds ~PFCs!, gases which have large global warming potentials, are widely used in plasma processing for etching and chamber cleaning. Due to underutilization of the feedstock gases or by-product generation, the effluents from plasma tools using these gases typically have large mole fractions of PFCs. The use of plasma burn-boxes located downstream of the plasma chamber has b...